High-energy and reactive particles from the plasma gas phase bombard all materials in contact with them. They can, depending on the process control,
- remove the surface,
- create chemical functions on the surface or
- Separate layers.
Ablation, functionalization and deposition take place simultaneously as elementary processes in every plasma treatment. Thus plasma processes can be used for
- Etch, clean, activate,
- chemical functionalization and
- coating can be used.
Which of the processes determines the net result of the treatment - whether etching or coating is ultimately preferred - depends on various parameters in process control. For each task, we determine the optimum parameters for the desired change in surface properties.
further information on the effect of plasmas